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Model 3775-BM Solar Wafer Diffusion Load/Unload Test System

Key Features

  • Low Breakage rate
  • High Throughput
  • Flex picker robot transfer
  • Surface Inspection:Option
  • Loader: Quartz Boat
  • Unload:Manz Box / Cassette(option)
Chroma 3710 Solar Wafer Inspection System
 

 

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Product Details

Furnace tube process is commonly used for wafer phosphorous diffusion . Chroma is not only providing short boat but also long boat for diffusion process loader/Unloder system to our customers. High speed flex picker robots are used on wafer transfer . Chroma provide the lower breakage, high throughout and low cost loader and unloader system in diffusion process and met our customer all of diffusion process function requirement.

 

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