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Model 58173-V VCSEL Test System
Chroma 58173-V VCSEL Test System  

Key Features

  • Complete wafer map generation with localized or remote post-processing.
  • Ability to generate datasets compatible to INK or Die Sort Processes.
  • Ability to handle broken wafers or singulated die.
  • Capable of handling 3" or 4" VCSEL wafers natively, no modications necessary.
  • Several modes of operation, including fully manual or automated.
  • High speed VCSEL wafer indexing.
  • Ability to handle singulated probes or fully configured probe cards.
  • Fine resolution CCD scanner. Can be used for automated wafer alignment or individual die photographs.
  • Temperature controller capability.
  • Accurate and Fast 4-quadrant SMU source for full VCSEL Sweep Characteristics.
  • Complete Characterization Capability
    • L-I-V: Light, Current, and Voltage
    • ITH: Threshold Current
    • IOP: Typical Operating Current
    • VF: Forward Voltage
  • Breakdown Characteristics
    • Kink: Output Power Linearity
    • Rollover: Output power reduction as forward current is increased
    • Spectral: Peak wavelength or Spectral Bandwidth
  • Various options for other non-chip form factors for correlation measurements and gauge studies
Data Sheet
  • Product Details
  • Specifications
  • Request More Information
Product Details

58173-V ApplicationsChroma is a world leader in LED Wafer characterization and test systems. The addition of the 58173-V to Chroma’s product line, designed for VCSEL wafer characterization and test, extends this lead. Able to be user-configurable, this platform can be run in several modes. Manually driven, to be used in R&D and QA for individual or group complete device characterization and validation or automatically in a fully automated mode for rapid production test. There are also various mechanical adapters to enable the use of other package types.

The Chroma 58173-V system is suitable for a wide range of wavelengths, from visible to long wavelengths (500~1600nm) by selecting the respective optical modules & software settings. With the use of an integrating sphere as the main medium of output power collection, along with a database of pre-dened or custom algorithms, the system gathers all necessary data from the VCSEL DUT. It may be as simple as singular data point measurement or output power or as complex as a fully detailed LIV sweep. The system is capable of real time limits calculation to display pass/fail criterion or perform a full suite of post processing tests once the raw data is gathered.

The Chroma 58173-V is available with a wafer chuck suitable for 3" and 4" VCSEL wafer substrate diameters. There is an optional temperature controller for a greater degree of test capability at various levels of thermal stress on the DUT.

Leveraging Chroma’s world lead in PXI-Based precision source measure systems, the Chroma 58173-V uses a 52400 series 4-quadrant PXI Source-Measure Unit for both test speed and accuracy. This product has up to 7 current force/sense ranges (200mA max) with a very low noise floor for low level leakage measurements. The fast slew-rate driver enables pulsed measurement from a few micro-seconds to CW for added exibility.

Specifications
 Compatible Form Factors     
Form Factor 4"~6" wafer. Die/TO/ OSA and others as Options
Current Ranges
Current Ranges
(Source & Measurement)
0 ~ 200mA
Current Resolution (18 bit) ± 1.6nA / ± 16nA / ± 160nA / ± 1. 6A
Current Accuracy
(Source & Measurement)
I range ≥ 1mA: 0.1% + 0.1% FS
I range < 1mA: 0.05% + 0.2% FS
Voltage Ranges
Compliance Voltage Range ± 0.5V / 1V / 2.5V / 5V / 10V / 25V
Compliance Voltage Accuracy ≥ 1V: 0.05% + 0.01%FS ; <1V: 0.05% + 0.1%FS
Voltage Measurement ± 3.8nV~ ± 25V
Voltage Measurement Accuracy 0.05% + 38nV @0.5V to 0.05% + 1.9mV @25V
Additional Measurement Parameter (thermal control)
Electro-Optical ΔIth, ΔVf /ΔT, Δη/ΔT
Spectral Δλp /ΔT
Wavelength Measurement
Detector Type *1 2" integrated sphere
Spectrometer Chroma 52962HR
Wavelength Range *2 500~1000nm, (NIR range is an option)
Fiber Core Diameter 62.5μm or customizable
Spectrometer Resolution 2048 Pixel CCD ; 14 bit A/D
Total Measurement LD Angle ≥30°
Wave length Resolution *3 Optical : ~0.05 nm ; Pixel : ~0.5 nm
Dominant Wavelength Repeatability *4 ± 0.2 nm
Optical Power Meter
Minimum Input Current 15 nA
Maximum Input Current 9.5 mA
Range 10mA / 1mA / 100μA / 10μA / 1μA / 100nA
Resolution 15 bit
Accuracy 10mA : ±1% ± 2μA / 1mA : ±1% ± 0.2μA
100μA : ±1% ± 0.1μA / 10μA : ±3% ± 30nA
1μA : ±3% ± 10nA / 100nA : ±3% ± 5nA
Thermal-Electrical Controller
Thermal-Electrical Controller 300W
Temperature Range -4°C~80°C
Temperature Accuracy 1.2 °C
Cooling System Liquid type
Mechanical Specification
Prober Thermal Control Chuck for Wafers, others optional
Chuck Size 6 inch
Dimension 970 (L) x 970 (W) x 2250 (H) mm
Weight 580kg<
Air Input Φ 6 mm
Air Flow Rate 7 L/min
Operating Environment Temperature : 23 °C~28 °C ; Humidity : <70%
Software
Operating System Supported Microsoft Windows® 2000, XP or 7

Note *1 : 6" larger Integrate sphere is optional
Note *2 : NIR range measurement from 950nm~1600 nm by InGaAs detector
Note *3 : Variations on pixel resolution are grating dependent. Customized gratings available.
Note *4 : Dependent on DUT quality without thermal effect

All specifications are subject to change without notice.

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