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Chroma 7980 2D/3D wafer metrology system provides accurate and reliable profile information. 7980 adopts newly developed BLiS technology and specially designed platform to achieve 2D/3D nanoscale measurement. Purpose-built software is provided for different applications, especially in the advanced packaging. The large-area stitching capability can meet various needs in the industry. The UI includes 2D/3D graphic display for the receipe setting and measurement results.